JPH0363937U - - Google Patents
Info
- Publication number
- JPH0363937U JPH0363937U JP12423089U JP12423089U JPH0363937U JP H0363937 U JPH0363937 U JP H0363937U JP 12423089 U JP12423089 U JP 12423089U JP 12423089 U JP12423089 U JP 12423089U JP H0363937 U JPH0363937 U JP H0363937U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- cassette
- transfer
- boat
- hawk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423089U JPH0363937U (en]) | 1989-10-23 | 1989-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423089U JPH0363937U (en]) | 1989-10-23 | 1989-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363937U true JPH0363937U (en]) | 1991-06-21 |
Family
ID=31672162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12423089U Pending JPH0363937U (en]) | 1989-10-23 | 1989-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363937U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100317320B1 (ko) * | 1999-05-24 | 2001-12-22 | 김영환 | 반도체소자 제조를 위한 화학기상증착 공정용 웨이퍼 핸들링 장치 |
-
1989
- 1989-10-23 JP JP12423089U patent/JPH0363937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100317320B1 (ko) * | 1999-05-24 | 2001-12-22 | 김영환 | 반도체소자 제조를 위한 화학기상증착 공정용 웨이퍼 핸들링 장치 |